Christina Yau

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

R. Maboudian, M. Dugger, C. Carraro, 2001 .

Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS

Roger T. Howe, Roya Maboudian, Carlo Carraro, 2001 .