K. Nagaseki

发表

Negative Ions in 13.56 MHz Discharge of SF6 Gas in a Planar Diode

E. Nishimura, Yukinori Saito, I. Ishikawa, 1995 .

Mass spectrometry of discharge products at 13.56 MHz in SF6 gas

Hidehiko Kobayashi, Eiichi Nishimura, Itsuo Ishikawa, 1994 .

Ionic Species in 13.56 MHz Discharges in CF 4 Gas and Mixtures of It with Ar and O 2

S. Sasaki, S. Suganomata, Yukinori Saito, 1997 .

Mass Spectrometric Observation of Decomposition Products SFx (x=1, 2) in SF6 Discharge at 13.56 MHz

E. Nishimura, I. Ishikawa, Yukinori Saito Yukinori Saito, 1993 .

Positive and negative ions in RF plasmas of SF6/N2and SF6/Ar mixtures in a planar diode

S. Sasaki, S. Suganomata, Yukinori Saito, 1997 .

Positive Ions in RF Discharge Plasma of CF 4 Gas in a Planar Diode

S. Sasaki, S. Suganomata, Yukinori Saito, 1996 .

Positive Ions in RF Discharge Plasmas of C4F8/Ar and C4F8/O2 Mixtures

S. Sasaki, Y. Hirose, S. Suganomata, 1998 .

Positive Ions in C 4F 8 RF Discharge in a Planar Diode

S. Sasaki, Y. Hirose, S. Suganomata, 1997 .

Characteristics of Parallel-Plate RF Discharges in C 4F 8 Gas and C 4F 8/O 2 Mixtures

K. Aoyagi, S. Suganomata, Yukinori Saito, 1997 .