Somit Talwar

Manufacturing process for integrated circuits with reduced dimension

Somit Talwar, Karl-Josef Kramer, Guarav Verma, 1998 .

Laser thermal processing for shallow junction and silicide formation

Gaurav Verma, Somit Talwar, Kurt H. Weiner, 1998, Advanced Lithography.

Ultra-shallow, abrupt, and highly-activated junctions by low-energy ion implantation and laser annealing

Somit Talwar, Kurt H. Weiner, G. Verma, 1998, 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144).