Feng Zhang

Inverse design of high-NA metalens for maskless lithography

Henry I. Smith, O. Miller, Haejun Chung, 2022, Nanophotonics.

Real-time spatial-phase-locked electron-beam lithography

Feng Zhang, Feng Zhang, 2005 .

Nanometer-level stitching in raster-scanning electron-beam lithography using spatial-phase locking

Feng Zhang, Henry I. Smith, Jeffrey T. Hastings, 2003 .

Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling

Mark A. Finlayson, Feng Zhang, Henry I. Smith, 2000 .

Partial blanking of an electron beam using a quadrupole lens

Henry I. Smith, Feng Zhang, 2005 .