M. Zickar

Air dispersion measurement by second harmonic interferometry

Rene Dandliker, Yves Salvade, M. Zickar, 2003, International Commission for Optics.

Quasi-dry Release for Micro Electro-Mechanical Systems

W. Noell, N. F. de Rooij, T. Overstolz, 2005 .

Low Cross Talk Design and Simple Fabrication Process of Electrostatic Vertical Comb-drive Actuators for Positioning Application

Hiroyuki Fujita, Manabu Ataka, Makoto Mita, 2007 .

Wafer level hermetic package and device testing of a SOI-MEMS switch for biomedical applications

M. Zickar, Cornel Marxer, Rogier Receveur, 2006 .

A clean wafer-scale chip-release process without dicing based on vapor phase etching

W. Noell, T. Overstolz, M. Zickar, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

Arrays of High Tilt-Angle Micromirrors for Multiobject Spectroscopy

W. Noell, M. Zickar, S. Waldis, 2007, IEEE Journal of Selected Topics in Quantum Electronics.

Development of scanning MEMS mirror with new assembly structure

Wilfried Noell, Siak Piang Lim, N. F. de Rooij, 2006 .

Uniform tilt-angle micromirror array for multiobject spectroscopy

Wilfried Noell, Patrick Lanzoni, Severin Waldis, 2008 .