Chris Deeb

Characterization of ultrathin films by laser-induced sub-picosecond photoacoustics with coherent extreme ultraviolet detection

Qing Li, Margaret M. Murnane, Erik Anderson, 2012, Advanced Lithography.

Automated S/TEM metrology on advanced semiconductor gate structures

Chris Deeb, C. Hobbs, M. Strauss, 2012, Advanced Lithography.

The limits and extensibility of optical patterned defect inspection

Bryan M. Barnes, Richard M. Silver, Hui Zhou, 2010, Advanced Lithography.

13nm gate Intentional Defect Array (IDA) wafer patterning by e-beam lithography for defect metrology evaluation

John G. Hartley, Ananthan Raghunathan, Chris Deeb, 2011 .