Masami Naitou

Analysis and Reduction of Stacking Faults in Fast Epitaxial Growth

H. Tsuchida, I. Kamata, T. Kozawa, 2016 .

Advances in Fast Epitaxial Growth of 4H-SiC and Defect Reduction

H. Tsuchida, I. Kamata, T. Kozawa, 2016 .

Evolution of Fast 4H-SiC CVD Growth and Defect Reduction Techniques

H. Tsuchida, I. Kamata, J. Kojima, 2014 .

Fast 4H-SiC Epitaxial Growth on 150 mm Diameter Area with High-Speed Wafer Rotation

H. Tsuchida, I. Kamata, T. Kozawa, 2014 .