N. Miyoshi

Incident energy dependence of the scattering dynamics of water molecules on silicon and graphite surfaces: the effect on tangential momentum accommodation

S. Takagi, Y. Matsumoto, I. Kinefuchi, 2017, Microfluidics and Nanofluidics.

Incident energy dependence of the scattering dynamics of water molecules on silicon and graphite surfaces: the effect on tangential momentum accommodation

S. Takagi, Y. Matsumoto, I. Kinefuchi, 2017 .

Hyperthermal molecular beam source using a non-diaphragm-type small shock tube.

S. Takagi, Y. Matsumoto, I. Kinefuchi, 2016, The Review of scientific instruments.

A non-diaphragm type small shock tube for application to a molecular beam source.

S. Takagi, Y. Matsumoto, I. Kinefuchi, 2013, The Review of scientific instruments.

Molecular beam study of the scattering behavior of water molecules from a graphite surface.

S. Takagi, Y. Matsumoto, I. Kinefuchi, 2014, The journal of physical chemistry. A.

Rapid thermal-cyclic atomic-layer etching of titanium nitride in CHF3/O2 downstream plasma

M. Hori, K. Ishikawa, Nobuya Miyoshi, 2019, Journal of Physics D: Applied Physics.

Atomic layer etching of silicon nitride using infrared annealing for short desorption time of ammonium fluorosilicate

Hiroyuki Kobayashi, Nobuya Miyoshi, Masaru Izawa, 2017 .

Selective atomic-level etching using two heating procedures, infrared irradiation and ion bombardment, for next-generation semiconductor device manufacturing

Kenji Maeda, Masaru Hori, Hiroyuki Kobayashi, 2017 .