M. Boettcher

Combined use of confocal laser scanning microscopy and transmission electron microscopy for visualisation of identical cells processed by cryotechniques

K. Krupinska, S. Pfeiffer, M. Beese, 2003, Protoplasma.

High resolution variable-shaped beam direct write

Lutz Bettin, Thomas Elster, Bernd Schnabel, 2007 .

High resolution patterning - Preparation of VSB systems for 22nm node capability

U. Weidenmueller, Monika Boettcher, Peter Hahmann, 2010 .

Modified dose correction strategy for better pattern contrast

R. Galler, M. Krueger, M. Suelzle, 2010, European Mask and Lithography Conference.