U. Neuschaefer-Rube

Multisensor data fusion in dimensional metrology

Xiangqian Jiang, Albert Weckenmann, Jörg Seewig, 2009 .

Präzise Strukturmeßtechnik mit lasergestützter Mikroellipsometrie / Precise Structure Measurement using Laser-Based Microellipsometry

U. Neuschaefer-Rube, W. Holzapfel, J. Doberitzsch, 1999 .

Computed Tomography – a highly potential tool for industrial quality control and production near measurements

U. Neuschaefer-Rube, M. Bartscher, U. Neuschaefer-Rube, 2022 .