Arman Gasparyan

Processing challenges in the fabrication of advanced MEMS

Dennis S. Greywall, J. F. Miner, William M. Mansfield, 2004 .

Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors

Susanne Arney, Vladimir A. Aksyuk, Arman Gasparyan, 2000, SPIE MOEMS-MEMS.

Optical MEMS devices for telecom systems

Jian Liu, David J. Bishop, Dennis S. Greywall, 2003, SPIE Microtechnologies.

Design for Reliability of MEMSMOEMS for Lightwave Telecommunications

Suresh Goyal, Martin Haueis, Herbert R. Shea, 2002 .

Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages

Susanne Arney, David Abusch-Magder, Herbert R. Shea, 2000, SPIE MOEMS-MEMS.

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Herbert Shea, David J. Bishop, Suresh Goyal, 2001, SPIE MOEMS-MEMS.