Cao Le

Research development of silicon MEMS gyroscopes: a review

Guo Zhanshe, Cao Le, Li Boyu, 2015 .

Research development of silicon MEMS gyroscopes: a review

Li Boyu, Guo Zhanshe, Chen Fucheng, 2015, Microsystem Technologies.

Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator

Guo Zhanshe, Feng Zhou, Cao Le, 2011 .