Charles D. Schaper

Control strategy for temperature tracking in rapid thermal processing of semiconductor wafers

Thomas Kailath, PooGyeon Park, Charles D. Schaper, 1992, [1992] Proceedings of the 31st IEEE Conference on Decision and Control.

Real-Time Control of Rapid Thermal Processing Semiconductor Manufacturing Equipment

Charles D. Schaper, 1993, 1993 American Control Conference.

Pattern recognition algorithms for linewidth measurement

Thomas Kailath, Hamid Aghajan, Charles D. Schaper, 1992, Advanced Lithography.

Decentralized control of wafer temperature for multizone rapid thermal processing systems

Thomas Kailath, Yong Jin Lee, Charles D. Schaper, 1999, ICMTS 1999.

Modeling and control of rapid thermal processing

Thomas Kailath, PooGyeon Park, Krishna C. Saraswat, 1992, Other Conferences.

Modeling, Identification, and Control of Rapid Thermal Processing Systems

Mehrdad M. Moslehi, Krishna C. Saraswat, Thomas Kailath, 1994 .

Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing

Arthur Tay, Weng Khuen Ho, Charles D. Schaper, 2004 .

Applications of mathematical systems science to nanolithography of integrated circuits

Thomas Kailath, Charles D. Schaper, T. Kailath, 1999, Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.99CH36301).