M. D. Nijkerk

Simulation of material and processing effects on photoresist line-edge roughness

G. P. Patsis, M. D. Nijkerk, L.H.A. Leunissen, 2006, Int. J. Comput. Sci. Eng..

Freeform optics design tool for compact spectrometers

M. D. Nijkerk, J. Michael Gruber, Bart Boonacker, 2019, International Conference on Space Optics.

Simulation of the combined effects of polymer size, acid diffusion length, and EUV secondary electron blur on resist line-edge roughness

Evangelos Gogolides, Ioannis Raptis, George P. Patsis, 2007, SPIE Advanced Lithography.

Spectrometry: photon sorting at the speed of light

M. D. Nijkerk, H. J. P. Vink, J. P. R. Day, 2015, SPIE Optical Systems Design.

Freeform design and fabrication: Where the proof of the pudding is in verification

M. D. Nijkerk, O. E. Van der Togt-Marinescu, G. P. Gubbels, 2017, International Conference on Space Optics.

High throughput defect detection with multiple parallel electron beams

M. D. Nijkerk, Pieter Kruit, P. Kruit, 2007 .