Tetsuya Makimura

发表

Micromachining of Inorganic Materials using Laser Plasma Soft X-Rays

Satoshi Uchida, Kouichi Murakami, Hiroyuki Niino, 2007 .

Silica nano-ablation using laser plasma soft x-rays

Hiroyuki Niino, Tetsuya Makimura, Shuichi Torii, 2009, Optics + Optoelectronics.

Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining

Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, 2011, Optics + Optoelectronics.

Ablation of inorganic materials using laser plasma soft x-rays

Satoshi Uchida, Hiroyuki Niino, Tetsuya Makimura, 2007, SPIE Optics + Optoelectronics.

Microfabrication of through holes in polydimethylsiloxane (PDMS) sheets using a laser plasma EUV source (Conference Presentation)

Hiroyuki Niino, Tetsuya Makimura, Hikari Urai, 2017, LASE.

Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas

Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, 2013, Europe Optics + Optoelectronics.

Silica ablation process induced by focused laser plasma soft x-rays

Hiroyuki Niino, Tetsuya Makimura, Shuichi Torii, 2012, Other Conferences.

Ablation Process of Silica Glass Induced by Laser Plasma Soft X-ray Irradiation

Kouichi Murakami, Hiroyuki Niino, Shuichi Torii, 2009 .

Study on Non-Thermal Ablation Process of Silica Glass Using Laser Plasma Soft X-rays toward Nanomachining

Kouichi Murakami, Hiroyuki Niino, Shuichi Torii, 2009 .

Erbium and phosphorus impurity doping in Si nanostructures fabricated by laser ablation

Tetsuya Makimura, Kouichi Murakami, Keiichi Kondo, 2002, SPIE LASE.

Synthesis of silicon nanoparticles and impurity doping by laser ablation

Tetsuya Makimura, Kouichi Murakami, Changquing Li, 2001, SPIE LASE.

Quartz micromachining using laser plasma soft x rays and ultraviolet laser light

Kiminori Kondo, Tetsuya Makimura, Kouichi Murakami, 2004 .

Light Emission from Nanometer-Sized Silicon Particles Fabricated by the Laser Ablation Method

Tetsuya Makimura, Kouichi Murakami, Yasuhiko Kunii, 1996 .

Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm.

Takeshi Higashiguchi, Masaharu Nishikino, Shigeru Ohta, 2016, The Review of scientific instruments.

Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas.

Taisuke Miura, Bowen Li, Tatsuo Okada, 2013, Optics express.

Direct Etching of Poly(methyl methacrylate) Using Laser Plasma Soft X-rays

Tatsuo Okada, Hiroyuki Niino, Daisuke Nakamura, 2010 .

Silicon nanoparticles embedded in SiO2 films with visible photoluminescence

Yasuharu Kunii, Tetsuya Makimura, Naoaki Ono, 1998 .

Time-Resolved X-Ray Absorption Spectroscopy for Laser-Ablated Silicon Particles in Xenon Gas

Tetsuya Makimura, Kouichi Murakami, Tamaki Sakuramoto, 1996 .

Dynamics of silicon plume generated by laser ablation and its chemical reaction

Tetsuya Makimura, Kouichi Murakami, T. Makimura, 1996 .

Soft X-ray emission from molybdenum plasmas generated by dual laser pulses

Bowen Li, Takeshi Higashiguchi, Weihua Jiang, 2016 .

Tuning extreme ultraviolet emission for optimum coupling with multilayer mirrors for future lithography through control of ionic charge states

Bowen Li, Takeshi Higashiguchi, Weihua Jiang, 2014 .

Silica nanomachining using laser plasma soft x rays

Hiroyuki Niino, Satoshi Uchida, Tetsuya Makimura, 2006 .

Ablation of silica glass using pulsed laser plasma soft X-rays

Hiroyuki Niino, Tetsuya Makimura, Kouichi Murakami, 2005 .

Visible Light Emission from SiO_x Films Synthesized by Laser Ablation

Tetsuya Makimura, Kouichi Murakami, Yasuhiko Kunii, 1996 .

Self-Assembled Monolayer as a Template to Deposit Silicon Nanoparticles Fabricated by Laser Ablation

Hidemi Shigekawa, Satoshi Yasuda, Kenji Hata, 2001 .

Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays

Hiroyuki Niino, Tetsuya Makimura, Kouichi Murakami, 2005 .