Pavel Mareš

Multilayer thin films of aluminum oxide and tantalum oxide deposited by pulsed direct current magnetron sputtering for dielectric applications

R. Drevet, K. Balázsi, M. Dubau, 2023, Vacuum.

Superior high-temperature oxidation resistance of magnetron sputtered Hf–B–Si–C–N film

P. Zeman, Jiechao Jiang, J. Vlček, 2016 .

Hard multifunctional Hf–B–Si–C films prepared by pulsed magnetron sputtering

P. Zeman, Jiechao Jiang, J. Vlček, 2014 .

Effect of energetic particles on pulsed magnetron sputtering of hard nanocrystalline MBCN (M = Ti, Zr, Hf) films with high electrical conductivity

J. Čapek, J. Vlček, J. Houska, 2019, Thin Solid Films.

Dependence of structure and properties of hard nanocrystalline conductive films MBCN (M = Ti, Zr, Hf) on the choice of metal element

J. Vlček, J. Houska, R. Čerstvý, 2015 .

Dependence of characteristics of MSiBCN (M = Ti, Zr, Hf) on the choice of metal element: Experimental and ab-initio study

J. Vlček, J. Houska, R. Čerstvý, 2016 .