Michael Darwin

Pre bonding metrology solutions for 3D integration

Didier Landru, Mariam Sadaka, Ionut Radu, 2010, 2010 IEEE International 3D Systems Integration Conference (3DIC).

Laser micro-fabrication systems for consumer electronics device manufacturing

Qian Xu, Haibin Zhang, Michael Darwin, 2013, CLEO: 2013.

Automatic classification of microlithography macrodefects using a knowledge-based system

Yongqiang Liu, Michael Darwin, Pinar Kinikoglu, 2005, SPIE Advanced Lithography.

Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling.

Jan Liesener, Peter de Groot, Michael Darwin, 2008, Optics express.