G. Z. Yan

A new robot system for auto-inspection of intersected welds of pipes used in nuclear power stations

Huiran Liu, X. G. Fu, G. Z. Yan, 2006 .

Digital Controller Design for Sense Mode of Micro-Machined Gyroscope

Zhenchuan Yang, Long Wang, Chun Hua He, 2013 .

A single mask dry releasing process for making high aspect ratio soimemsdevices

G. Z. Yan, Y. M. Wei, X. Mao, 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems.

Post CMOS integration of high aspect ratio SOI MEMS devices

G. Z. Yan, L. Qian, Z. C. Yang, 2011, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Fabrication of Sub-100-nm silicon nanowire devices on SOI wafer by CMOS compatible fabrication process

G. Z. Yan, Z. C. Yang, L. N. Sun, 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems.

CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures

Liang Qian, G. Z. Yan, Z. C. Yang, 2011, 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.