Karine Jullian

Expanding DSA process window with atmospheric control

Masahiko Harumoto, Masaya Asai, Charlotte Bouet, 2020, Advanced Lithography.

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Charles Pieczulewski, Masaya Asai, Christophe Navarro, 2014 .