Kouichirou Sakanishi

Diffusion barrier properties of ZrN films in the Cu/Si contact systems

A. Noya, M. Takeyama, Kouichirou Sakanishi, 2000 .

Application of amorphous Cu–Zr binary alloy as a diffusion barrier in Cu/Si contact systems

K. Sasaki, A. Noya, M. Takeyama, 1996 .

Solid-Phase Reactions of Diffusion Barriers of Ti and TiN to Copper Layers on SiO2

A. Noya, M. Takeyama, Kouichirou Sakanishi, 1996 .