S. Jacq

Correlation between mass-spectrometer measurements and thin film characteristics using dcMS and HiPIMS discharges

J. Keraudy, M. Djouadi, F. Schuster, 2014 .

H atom surface loss kinetics in pulsed inductively coupled plasmas

C. Cardinaud, L. Le Brizoual, A. Granier, 2013 .

Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure

A. Sharaiha, F. Cheviré, R. Benzerga, 2015 .

Deposition and dielectric characterization of strontium and tantalum-based oxide and oxynitride perovskite thin films

A. Sharaiha, F. Cheviré, R. Benzerga, 2016 .