N. Umezu

Formation of thick titanium carbide films by the hollow cathode discharge reactive deposition process

S. Komiya, T. Narusawa, N. Umezu, 1978 .

Characterization of thick chromium-carbon and chromium-nitrogen films deposited by hollow cathode discharge

S. Ono, S. Komiya, T. Narusawa, 1977 .

Hardness and grain size relations for thick chromium films deposited by hallow cathode discharge

S. Ono, S. Komiya, N. Umezu, 1977 .

Titanium nitride film as a protective coating for a vacuum deposition chamber

S. Komiya, C. Hayashi, N. Umezu, 1979 .