Yasunori Wada

Laser-produced-plasma light source for EUV lithography

Koichi Toyoda, Yoshifumi Ueno, Tatsuya Ariga, 2005, SPIE Advanced Lithography.

21323 Study on Improved Suspension for Seismic and Vibration Isolation : Part 5 Confirmation of the effect of the local vibration measurement in a joint and the rubber vibration isolator in an oil damper edge

Isamu Suzuki, Kei Haraguchi, Yousuke Suzuki, 2015 .

Characterization and optimization of tin particle mitigation and EUV conversion efficiency in a laser produced plasma EUV light source

Georg Soumagne, Akira Endo, Akira Sumitani, 2011, Advanced Lithography.

OS4-1-4 Increase in output power of an electrostatic induction energy harvester by stacking electrets

Hiroki Kuwano, Yasunori Wada, Hiroyuki Oguchi, 2012 .