Aaron Gower-Hall

In-design DFM CMP flow for block level simulation using 32nm CMP model

Naya Ha, Jinwoo Lee, Kee Sup Kim, 2011, Advanced Lithography.

Hotspot detection and removal flow using multi-level silicon-calibrated CMP models

Sang-Min Han, Yongfu Li, Brian Lee, 2016, SPIE Advanced Lithography.

Characterization of shallow trench isolation CMP process and its application

Hua Ding, Flora Li, Yang-Chih Chiu, 2016, SPIE Advanced Lithography.

Understanding, modeling, and detecting pooling hotspots in copper CMP

Laertis Economikos, Stephen Greco, Tamba Gbondo-Tugbawa, 2012, Thirteenth International Symposium on Quality Electronic Design (ISQED).