Sanghun Song

Electron energy distributions in a magnetized inductively coupled plasma

M. Kushner, Yang Yang, P. Chabert, 2014 .

Control of electron energy distributions and plasma characteristics of dual frequency, pulsed capacitively coupled plasmas sustained in Ar and Ar/CF4/O2

M. Kushner, Sanghun Song, 2012 .

Control of plasma kinetics for microelectronics fabrication

Sanghun Song, 2014 .

Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2

M. Kushner, Sanghun Song, 2014 .

Effect of Driving Frequency on Reduction of Radar Cross Section Due to Dielectric-Barrier-Discharge Plasma in Ku-Band

J. Yook, Yongshik Lee, Jangjae Lee, 2021, IEEE Transactions on Plasma Science.

Properties of nonthermal capacitively coupled plasmas generated in narrow quartz tubes for synthesis of silicon na-noparticles

M. Kushner, U. Kortshagen, S. Girshick, 2013, International Conference on Plasma Science.

Capacitance Between an Atmospheric Discharge Plasma and the Dielectric Electrode in the Parallel Cell Reactor

Gon-Ho Kim, Gon-Ho Kim, Soo-Yeon Jeong, 2006 .