Laura Ahmels

High-end EUV photomask repairs for 5nm technology and beyond

Fan Tu, Renzo Capelli, Horst Schneider, 2020, Photomask Technology.

Research on the influence of the metal working of the band edge on the process of linear flow splitting

Peter Groche, Laura Ahmels, Manuel Neuwirth, 2015 .

Research on the influence of the band edge processing on the process of linear flow splitting

Peter Groche, Laura Ahmels, Manuel Neuwirth, 2016 .

Finding New Opportunities: Technology Push Approach

Christian Wagner, Vinzent Monnerjahn, Peter Groche, 2017 .

Pushing the limits of EUV mask repair: addressing sub-10 nm defects with the next generation e-beam-based mask repair tool

Renzo Capelli, Tilmann Heil, Johannes Schöneberg, 2021, Journal of Micro/Nanopatterning, Materials, and Metrology.