Dorian Zahorski

Single-shot excimer laser annealing of PECVD amorphous silicon

Y. Suzuki, Pierre Boher, Dorian Zahorski, 1996, Other Conferences.

Excimer laser annealing system for AMLCDs: a long laser pulse for high-performance, uniform, and stable TFT

Olivier Bonnaud, Dorian Zahorski, Christophe Prat, 2001, IS&T/SPIE Electronic Imaging.

Automated spectroscopic ellipsometry for characterization of complex multilayers for 550x650x0.7-mm LCD production control

Dorian Zahorski, Jean-Louis P. Stehle, Akira Iwasaki, 1996, Other Conferences.

60J XeCl laser for single-shot excimer laser annealing

Dorian Zahorski, Sylvie Prochasson, Bruno Godard, 1997, International Symposium on High Power Laser Systems and Applications.

Spectroscopic polarized scatterometry applied to single-line profiling

Dorian Zahorski, Jean-Philippe Piel, Jean-Louis Stehlé, 2006, SPIE Advanced Lithography.

High-energy-per-pulse excimer laser for silicon annealing

Dorian Zahorski, Bruno Godard, 1998, Other Conferences.