Jie Liu

Novel rotary chemical mechanical polishing on an integral impeller

Zhenyu Zhang, Dongdong Liu, Yubiao Li, 2021 .

Green chemical mechanical polishing of sapphire wafers using a novel slurry.

J. Liu, D. Guo, Zhenyu Zhang, 2020, Nanoscale.

Chemical mechanical polishing for sapphire wafers using a developed slurry

Zhenyu Zhang, L. Jie, Wenxiang Xie, 2021 .