Emmanuel M. Drege

Lithographic process monitoring using diffraction measurements

Emmanuel M. Drege, Dale M. Byrne, 2000, Advanced Lithography.

Profile parameter accuracy determined from scatterometric measurements

Emmanuel M. Drege, Dale M. Byrne, Rayan M. Al-Assaad, 2002, SPIE Advanced Lithography.

Mathematical analyses of inverse scatterometry

Emmanuel M. Drege, Rayan M. Al-Assaad, Dale M. Byrne, 2002, SPIE Advanced Lithography.

Linearized inversion of scatterometric data to obtain surface profile information

Emmanuel M. Drege, Dale M. Byrne, Jeffrey A. Reed, 2002 .