Miyu Haruguchi

Anticorrosive Behavior of Aluminum Nitride Surface Exposed to Chlorine Trifluoride Gas at High Temperatures

Kenta Irikura, Hitoshi Habuka, Yoshinao Takahashi, 2021 .

Exposure of Tantalum Carbide, Silicon Nitride and Aluminum Nitride to Chlorine Trifluoride Gas

Hitoshi Habuka, Yoshinao Takahashi, Miyu Haruguchi, 2019, ECS Journal of Solid State Science and Technology.