F. G. Boebel

USING A SYNERGETIC COMPUTER IN AN INDUSTRIAL CLASSIFICATION PROBLEM

Thomas Wagner, D. Seitzer, H. Haken, 1993 .

30% productivity increase of 16 Mb-DRAM gate-conductor etching without additional investment

F. G. Boebel, U. Rogatty, 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

Quintuple ramp up slope by implementing cross-functional, self-directed work teams

F. G. Boebel, 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

Cycle time reduction program at ACL

F. G. Boebel, O. Ruelle, 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

Synergetic learning for unsupervised texture classification tasks

U. Schramm, F. G. Boebel, Thomas Wagner, 1995 .

Simultaneous in situ measurement of film thickness and temperature by using multiple wavelengths pyrometric interferometry (MWPI)

F. G. Boebel, H. Moller, 1993 .