Yongan Xu

发表

Directed self assembly on resist-limited guiding patterns for hole grapho-epitaxy: Can DSA help lower EUV's source power requirements?

Yongan Xu, Chi-Chun Liu, Yuansheng Ma, 2015, Advanced Lithography.

Polymer brush as adhesion promoter for EUV patterning

Yongan Xu, Indira Seshadri, Jing Guo, 2018, Advanced Lithography.

Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle

Yongan Xu, John Arnold, Nelson Felix, 2017, Advanced Lithography.

Self-aligned blocking integration demonstration for critical sub-30-nm pitch Mx level patterning with EUV self-aligned double patterning

Yongan Xu, Akiteru Ko, Nelson Felix, 2018 .

Coater/developer based techniques to improve high-resolution EUV patterning defectivity

Yongan Xu, Akiteru Ko, Nelson Felix, 2017, Photomask Technology.

EUV patterning successes and frontiers

Yongan Xu, Nelson Felix, Hao Tang, 2016, SPIE Advanced Lithography.

Fabrication of 3D high index photonic crystals by holographic lithography and their fidelity

Yongan Xu, Shu Yang, Xuelian Zhu, 2009, OPTO.

Fundamental investigation of negative tone development (NTD) for the 22nm node (and beyond)

Yongan Xu, Jason Meiring, Karen Petrillo, 2011, Advanced Lithography.

Ultimate 2D resolution printing with negative tone development

Yongan Xu, Alexander Tritchkov, Martin Burkhardt, 2016, Advanced Lithography.

Development of amorphous silicon based EUV hardmasks through physical vapor deposition

Yongan Xu, Huixiong Dai, Indira Seshadri, 2017, Photomask Technology.

Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

Yongan Xu, Ali Adibi, Seung-Man Yang, 2007, SPIE OPTO.

Effects of film thickness on moisture sorption, glass transition temperature and morphology of poly(chloro-p-xylylene) film

Yongan Xu, Hong Yee Low, H. Huang, 2005 .

Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography withumbrella configuration.

Yongan Xu, Shu Yang, Xuelian Zhu, 2007, Optics express.

Crack-free 3D hybrid microstructures from photosensitive organosilicates as versatile photonic templates.

Yongan Xu, Xuelian Zhu, Shu Yang, 2009, ACS nano.

Electrodeposition of Three-Dimensional Titania Photonic Crystals from Holographically Patterned Microporous Polymer Templates

Yongan Xu, Jun Hyuk Moon, Joseph W. Perry, 2008 .

56 nm pitch copper dual-damascene interconnects with triple pitch split metal and double pitch split via

Yongan Xu, Yunpeng Yin, Chiew-seng Koay, 2012, 2012 IEEE International Interconnect Technology Conference.

Triply Periodic Bicontinuous Structures as Templates for Photonic Crystals: A Pinch‐off Problem

Yongan Xu, Seung-Man Yang, Jun Hyuk Moon, 2007 .

Poly(glycidyl methacrylate)s with controlled molecular weights as low-shrinkage resins for 3D multibeam interference lithography

Yongan Xu, Seth R. Marder, Jun Hyuk Moon, 2008 .

Effect Of Impurity On Cu Electromigration

Yongan Xu, Daniel C. Edelstein, Chenming Hu, 2010 .