Toyoharu Kamiya

Adhesion measurement of Ti thin films on Si substrate using internal stress in overcoated Ni films

Toyoharu Kamiya, Osamu Takenaka, Akira Kinbara, 1994 .

Evaluation of adhesion strength of Ti films on Si(100) by the internal stress method

Toyoharu Kamiya, Osamu Takenaka, Eiji Kusano, 1998 .