S Kurooka

Titanium nitride coating on implanted layer using titanium plasma based ion implantation

K. Yukimura, T. Maruyama, S. Kurooka, 1999 .

Titanium ion implantation into silicon substrate by plasma-based metal ion implantation system with 100-kV/2.5-A pulse modulator

K. Yukimura, S. Kurooka, A. Chayahara, 1998 .