Yong-qiang Chang

Microstructure and properties of nanocrystalline Cu–Ta thin films prepared by direct current magnetron sputtering

Shengwang Yu, M. Bao, J. Dai, 2020 .

Surface Morphology and Sputtering Mechanism of Etched Areas of a Metallic Target by Magnetron Sputtering

B. Tang, M. Bao, Guo-hua Zhao, 2021, Journal of Electronic Materials.