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Local wet-oxidation characteristic of strained-Si/SiGe-on-insulator

H. Hagino, T. Asano, T. Enokida, 2006 .

Cross-Hatch Related Oxidation and Its Impact on Performance of Strained-Si MOSFETs

Tanemasa Asano, Mika Nishisaka, T. Asano, 2004 .