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Surface modification of titanium by nitrogen ion implantation

H. Tsubakino, S. Fukumoto, M. Terasawa, 1999 .

Development of pure O2 cluster ion beam assisted deposition system

Isao Yamada, Kozo Mochiji, Noriaki Toyoda, 2005 .

Morphological evolution of surfaces irradiated by gas cluster ion beams during thin film deposition

I. Yamada, H. Tsubakino, N. Toyoda, 2005 .

HIGH QUALITY THIN FILM FORMATION WITH GAS CLUSTER ION BEAM ASSISTED DEPOSITION SYSTEM

I. Yamada, K. Mochiji, Y. Fujiwara, 2005 .