Peter Mayer

All polarization-maintaining fiber laser architecture for robust femtosecond pulse generation

Tilo Steinmetz, Marc Fischer, Wolfgang Hänsel, 2017 .

Laser produced plasma EUV sources for N5 HVM and beyond: performance, availability and technology innovation

David C. Brandt, Michael Purvis, Igor Fomenkov, 2021 .

EUV light source for high-NA and low-NA lithography

Daniel C. Brown, A. Schafgans, M. Purvis, 2023, Advanced Lithography.