Torsten Harzendorf

Wafer scale fabrication of submicron chessboard gratings using phase masks in proximity lithography

Uwe D. Zeitner, Frank Fuchs, Lorenz Stuerzebecher, 2012, Other Conferences.

Submicrometer pattern generation by diffractive mask-aligner lithography

Dirk Michaelis, Uwe D. Zeitner, Frank Fuchs, 2012, Other Conferences.

Fabrication of microlens arrays in CaF2 by ion milling

Ernst-Bernhard Kley, Axel Schindler, Dieter Flamm, 2000, SPIE MOEMS-MEMS.

Application of rigorously optimized phase masks for the fabrication of binary and blazed gratings with diffractive proximity lithography

Uwe D. Zeitner, Frank Fuchs, Lorenz Stuerzebecher, 2014, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.