C. Pieczulewski

1000°C Phase Relations and Superconductivity in the (Nd‐Ce‐Cu)‐O Ternary System

T. Mason, K. S. Kirkpatrick, C. Pieczulewski, 1990 .

Contact hole shrink by directed self-assembly: Process integration and stability monitored on 300 mm pilot line

Charles Pieczulewski, Masaya Asai, Christophe Navarro, 2014 .

300mm pilot line DSA contact hole process stability

S. Barnola, X. Chevalier, R. Tiron, 2014, Advanced Lithography.

Optimizing CD uniformity by total PEB cycle temperature control on track equipment

Koji Kaneyama, Akihiro Hisai, Charles Pieczulewski, 2002, SPIE Advanced Lithography.