M. Smayling

Test chip characterization of X architecture diagonal lines for SoC design

S. Shah, H. Brut, J.P. Schoellkopf, 2004, Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516).

Sub-20nm hybrid lithography using optical, pitch-division, and e-beam

L. Pain, S. Barnola, B. Icard, 2012, Advanced Lithography.