Jian Li

Plasma source ion implantation project at Southwestern Institute of Physics

X. Zeng, Z. Shang, K. Q. Chen, 1996 .

Interaction between the plasma and the workpiece surface in the process of plasma source ion implantation

K. Cheng, Z. Shang, Jian Li, 1994 .

Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation

P. Chu, Liuhe Li, R. Fu, 2009 .