Kei Somaya

Vertical attractive force generated in a noncontact chuck using ultrasonic vibration

Shigeka Yoshimoto, Tomohiro Shou, Kei Somaya, 2013 .

Development of ionic liquid circulation system in high-vacuum chamber for semiconductor device fabrication

T. Okabe, Kei Somaya, 2023, Vacuum.

Static characteristics of a water-lubricated hydrostatic thrust bearing using a membrane restrictor

Shigeka Yoshimoto, Masaaki Miyatake, Kei Somaya, 2014 .

Machining Temperature and Accuracy of Magnesium Alloy AZ31 with Deep-Hole Small Drilling

Kei Somaya, Masahiro Hagino, Takashi Inoue, 2021, Int. J. Autom. Technol..

Load capacity of aerodynamic foil thrust bearings supported by viscoelastic material

Shigeka Yoshimoto, Masaaki Miyatake, Kei Somaya, 2009 .

Static characteristics of small aerodynamic foil thrust bearings operated up to 350,000 r/min

Shigeka Yoshimoto, Masaaki Miyatake, Kei Somaya, 2014 .

Direct synthesis of Fluoropolymer particles in Ionic Liquids via the Photopolymerization of Solid Lubricants

T. Okabe, J. Miyamoto, Yuma Kobayashi, 2023, Tribology International.