R. Grenier

The electromagnetic performance of a surfatron-based coaxial microwave plasma torch

M. Moisan, Z. Zakrzewski, R. Grenier, 1995 .

Large Diameter Plasma Generation Using a Waveguide-Based Field Applicator at 2.45 GHz

M. Moisan, Z. Zakrzewski, G. Sauve, 1995 .

Influence of the wafer biasing frequency upon etching of polyimide

M. Moisan, Y. Arnal, G. Sauve, 1989, IEEE 1989 International Conference on Plasma Science.