J. Engemann

Mask fabrication by nanoimprint lithography using antisticking layers

Hella-Christin Scheer, Holger Schulz, Frank Osenberg, 2000, European Mask and Lithography Conference.

Characterization of MPCVD diamond films grown on porous silicon

Ludwig Josef Balk, Ralf Heiderhoff, J. Engemann, 1994, Photonics West - Lasers and Applications in Science and Engineering.

Surface wave operation mode of the slot antenna microwave plasma source SLAN

J. Engemann, D. Korzec, F. Werner, 1996 .

Electromagnetic Fields in a Slot Antenna Microwave Plasma Source: Numerical Simulation and Measurement

M. Walter, J. Engemann, R. Dahlhaus, 1998 .

Rapid surface modification of polyethylene in microwave and r.f.-plasmas: comparative study

T. Aumann, J. Engemann, J. Engemann, 2001 .

Multi-jet hollow cathode discharge for remote polymer deposition

J. Engemann, D. Korzec, D. Korzec, 1997 .

70 cm radio frequency hollow cathode plasma source for modification of foils and membranes

J. Engemann, D. Korzec, D. Korzec, 1997 .