M. Otaka

Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma

K. Koga, M. Shiratani, N. Itagaki, 2022, MRS Advances.

One-dimensional particle-in-cell/Monte Carlo collision simulation for investigation of amplitude modulation effects in RF capacitive discharges

D. Yamashita, K. Koga, M. Shiratani, 2022, MRS Advances.

Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma

D. Yamashita, K. Koga, M. Shiratani, 2022, AIP Advances.