J. T. Lee

Trace Rare Gases Optical Emission Spectroscopy for Determination of Electron Temperatures and Species Concentrations in Chlorine-Containing Plasmas

M. V. Malyshev, V. M. Donnelly, N. A. Ciampa, 1998 .

An introduction to plasma etching for VLSI circuit technology

Nace Layadi, Jennifer I. Colonell, John Tseng-Chung Lee, 1999, Bell Labs Technical Journal.

Metal Hard Mask Employed Cu/Low k Film Post Ash and Wet Clean Process Optimization and Integration into 65nm Manufacturing Flow

Wei Lu, Jianshe Tang, Han-Wen Chen, 2007 .

Study on the transport properties of MnGe(As 1- x P x ) 2 grown on GaAs(1 0 0)

Yunki Kim, J. Ketterson, Seungyon Cho, 2005 .