T. Okumura

Inductively Coupled Plasma Sources and Applications

Tomohiro Okumura, T. Okumura, 2010 .

Atmospheric Pressure Plasma Treatment and Non-Flux Lead-Free-Soldering of Cu Wire and Strand

Akio Furusawa, K. Suetsugu, T. Okumura, 2006 .

New very high frequency plasma source using a TM01-mode patch antenna with short pins

T. Matsui, K. Sakiyama, T. Okumura, 2000 .

Fine pattern etching of molybdenum by using atmospheric line shaped micro plasma source

M. Saitoh, T. Kimura, T. Okumura, 2002, 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers..

THE CONTEMPORARY MATERIALS CYCLE FOR RADIOACTIVE 137CS IN THE UNITED STATES

T. Graedel, T. Okumura, 2006, Health physics.

New inductively coupled plasma source using a multispiral coil

I. Nakayama, T. Okumura, 1995 .

Elongated Inductively Coupled Thermal Plasma Torch Operable at Atmospheric Pressure

T. Okumura, H. Kawaura, 2013 .

Annealing performance improvement of elongated inductively coupled plasma torch and its application to recovery of plasma-induced Si substrate damage

K. Eriguchi, T. Okumura, H. Kawaura, 2014 .

Fine Pattern Etching of Silicon Substrates Using Atmospheric Line-Shaped Microplasma Source

I. Matsuda, T. Okumura, Mitsuo Saitoh, 2003, Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference.

Fine Pattern Etching of Molybdenum Thin Film and Silicon Substrate by Using Atmospheric Line-Shaped Microplasma Source

T. Kimura, T. Okumura, Mitsuo Saitoh, 2003 .