Camille Petit-Etienne

Optimization of H2 thermal annealing process for the fabrication of ultra-low loss sub-micron silicon-on-insulator rib waveguides

Corrado Sciancalepore, Erwine Pargon, Philippe Lyan, 2018, OPTO.

Improvement of sidewall roughness of sub-micron silicon-on-insulator waveguides for low-loss on-chip links

Corrado Sciancalepore, Vincent Hughes, Erwine Pargon, 2017, OPTO.

Technological advances on Si and Si3N4 low-losses waveguide platforms for nonlinear and quantum optics applications

Corrado Sciancalepore, Erwine Pargon, Jean-Michel Hartmann, 2019, OPTO.

Selective enhancement of nonlinear processes in linearly uncoupled silicon resonators

Corrado Sciancalepore, Erwine Pargon, Marco Liscidini, 2021, OPTO.

Open Air Deposition of SiO2 Films by an Atmospheric Pressure Line‐Shaped Plasma

Camille Petit-Etienne, M. Tatoulian, F. Arefi-Khonsari, 2005 .

Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing

Olivier Joubert, Erwine Pargon, Gilles Cunge, 2010 .

Improvement of Sidewall Roughness of Submicron SOI Waveguides by Hydrogen Plasma and Annealing

Corrado Sciancalepore, Erwine Pargon, Philippe Lyan, 2018, IEEE Photonics Technology Letters.

Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform

Corrado Sciancalepore, Erwine Pargon, Stephane Bernabe, 2019, 2019 IEEE 16th International Conference on Group IV Photonics (GFP).