Anita Madan

发表

An investigation into the secondary level curriculum of cbse icse and ssc boards across schools in mumbai: a status study

Anita Madan, Anita Madan, 2013 .

Ultrathin (8-14 nm) Conformal SiN for sub-20 nm Copper/Low-k Interconnects

Daniel C. Edelstein, Alfred Grill, Jay Burnham, 2014 .

Recent Progress and Challenges in Enabling Embedded Si:C Technology

Bin Yang, Zhengmao Zhu, John Li, 2008 .

Novel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond

Todd C. Bailey, Yunlin Zhang, Robin Chao, 2014, Advanced Lithography.

Production and performance of multilayer coated conic sections

Melville P. Ulmer, Yong S. Chu, Anita Madan, 2002, SPIE Optics + Photonics.

Atomic Layer Deposition of Sidewall Spacers: Process, Equipment and Integration Challenges in State-of-the-Art Logic Technologies

Yiping Yao, Xin Zhou, Richard A. Conti, 2014 .

Multitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs

Todd C. Bailey, Yunlin Zhang, Gangadhara Raja Muthinti, 2014 .

Production and performance of multilayer-coated conical x-ray mirrors.

Anita Madan, Yong S Chu, Y. Chu, 2003, Applied optics.

Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress

Ying Li, Anita Madan, Oleg Gluschenkov, 2008 .

Through-Cobalt Self Forming Barrier (tCoSFB) for Cu/ULK BEOL: A novel concept for advanced technology nodes

Wei Wang, Raghuveer Patlolla, Elbert Huang, 2015, 2015 IEEE International Electron Devices Meeting (IEDM).

Observation of semiconductor device channel strain using in-line high resolution X-ray diffraction

Conal E. Murray, Stephen W. Bedell, Thomas N. Adam, 2013 .

Effective Cu surface pre-treatment for high-reliable 22nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k=2.2)

Stephan A. Cohen, Anita Madan, C-K. Hu, 2012 .

Quantification of local strain distributions in nanoscale strained SiGe FinFET structures

Akira Sakai, Conal E. Murray, Shotaro Takeuchi, 2017 .

Phase transitions in Ge-Sb phase change materials

Kumar Virwani, Simone Raoux, Martina Hitzbleck, 2009 .

Crystallization Characteristics of Ge-Sb Phase Change Materials

Simone Raoux, Anita Madan, Martin Salinga, 2009 .